Invited Speakers

  • Technical Challenges and Possible Solutions for Development of CMOS-MEMS and Piezoelectric MEMS Accelerometers

    Tuesday | March 26, 2024 | 14:10 - 14:40

    A technical presentation on the development of CMOS-MEMS and piezoelectric MEMS accelerometers, including design, modeling, simulation, fabrication, and testing, will be delivered. A special focus lies on the challenges we encountered during the development phase, such as in (i) device level: design trade-off, thin-film residual stress, fabrication imperfection/variation, etc.; (ii) interfaced circuit level: biasing issue, dc drift on high impedance node, low-corner frequency and bandwidth, etc.; (iii) sensing module level: packaging issues, spurious resonance from PCB/packaging, non-uniform frequency response, calibration, etc. Some potential approaches will be elaborated to address the aforementioned technical challenges. Finally, I will briefly introduce the applications of our developed MEMS vibration sensing module (accelerometer) in it’s a-site and b-site verifications.

  • Quantum Sensors for Long-Duration Navigation Without GNSS

    Wednesday | March 27, 2024 | 9:25 - 9:55

    Q-CTRL is Australia’s first VC-backed quantum technology company. In this talk, we present results and demonstrations of Q-CTRLs deployable quantum inertial sensors and recent improvements to their robustness and performance using quantum control, including a sensitivity increase of 23x when undergoing laser fluctuations corresponding to platform dynamics of order 1g.

  • Vibrating Beam MEMS Accelerometers for Gravimetry and Inertial Navigation

    Wednesday | March 27, 2024 | 14:10 - 14:40

    MEMS vibrating beam accelerometers operate on the principle of tracking shifts in the resonant frequencies of one or more micromachined vibrating elements coupled to a proof mass in response to changes in external acceleration. The resonant MEMS transduction approach offers scale-invariant mechanical sensitivity, extended mechanical bandwidth and dynamic range, and highly stable tracking of inertial forces. The development of highly accurate MEMS vibrating beam accelerometers (VBAs) has seen significant progress in recent years with application to the fields of gravimetry and inertial navigation. This talk will present the development of a first-of-its-kind resonant MEMS gravimeter with a resolution of less than 5 microGal and an emerging class of silicon MEMS VBAs for inertial navigation with performance benchmarking favorably with respect to the state-of-the-art.

  • Technologies for High Performance MEMS IMU Sensors

    Thursday | March 28, 2024 | 10:55 - 11:25

    Many applications in mobility and industrial machinery markets require reliable and robust IMU’s which maintain low noise and high accuracy operation in harsh environments. To reach high volume business required for MEMS, targets should be achieved with low-cost and compact solutions. This talk will provide some insight in Murata’s unique MEMS technology and innovative 3-axis sensor concepts behind new High Performance 6 Degrees of Freedom Sensor product.